IMPD

2023 Journals 1

1

“Thermal decomposition pathways of chlorinated trisilanes”

2023-09-11

Neung-Kyung Yu, Kyungjun Kim, Wonyeob Kim, Sung-Woong Chung*, Changhoon Heo, Bonggeun Shong*, “Thermal decomposition pathways of chlorinated trisilanes”, Silicon 15:3193-3199, 2023

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1 “Thermal decomposition pathways of chlorinated trisilanes”

1

“Thermal decomposition pathways of chlorinated trisilanes”