Atomic Layer Deposition

IMPD_lab
2024-06-26
조회수 253

1.공급량에 대해 self-limiting 특징

2.Temperature에 대해 self-limiting or slow dependency

3.Incubation time = f(T, P) ▶ roughness

4.Incubation time = f(surface active site, precursor structure)

419-1 C5, 80, Jigok-ro, Nam-gu, Pohang-si,

Gyeongsangbuk-do, Republic of Korea [37666]


swchung@postech.ac.kr

©2023 INNOVATIVE MEMORY PROCESS AND DEVICE. ALL RIGHTS RESERVED.


419-1 C5, 80, Jigok-ro, Nam-gu, Pohang-si, Gyeongsangbuk-do, Republic of Korea [37666]

swchung@postech.ac.kr

©2023 INNOVATIVE MEMORY PROCESS AND DEVICE. ALL RIGHTS RESERVED.