IMPD

2002 Journals 1

1

“Preparation of Silicon-on-Insulator Wafer Using Spin Etching and a Subsequent Selective Etching Process”

2023-09-12

Seong-Eun Lee, Seung-Jin Oh, Sang-Mun So, Heon-Do Kim, Sung-Woong Chung, Hyunchul Sohn, “Preparation of Silicon-on-Insulator Wafer Using Spin Etching and a Subsequent Selective Etching Process”, Japanese Journal of Applied Physics 41(8):5024-5029, 2002

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1 “Preparation of Silicon-on-Insulator Wafer Using Spin Etching and a Subsequent Selective Etching Process”

1

“Preparation of Silicon-on-Insulator Wafer Using Spin Etching and a Subsequent Selective Etching Process”